摘要
提出了一种新颖的"推—拉"接力运动原理,并将其应用于纳米级步距压电微动台的设计中。该原理变传统的单驱动器结构为双驱动器结构,避免了运动过程中的悬空状态,配以适当的四路驱动信号,使压电微动台能够实现连续、平稳的运动。根据使用要求设计了驱动控制系统,通过C8051F单片机产生四路驱动信号,以保证压电微动台在不同频率和电压下进行工作,并实现了整个系统的闭环控制。
A novel principle of push-pull relay movement is proposed and applied in the design of the piezoelectric micro-motion stage. In structure design the traditional single actuator is updated to the double actuators in order to avoid the impending state. With the proper four-channel driving signals, the stage can move continuously and smoothly. The driving and controlling system is designed. The four-channel driving signals with different voltage and frequency are generated by C8051F MCU. In addition the close-loop position is realized.
出处
《传感器与微系统》
CSCD
北大核心
2009年第6期53-55,58,共4页
Transducer and Microsystem Technologies
基金
国家自然科学基金资助项目(50105016)
关键词
尺蠖运动
压电马达
微驱动
微定位
inchworm motion
piezoelectric motor
micro driving
micro position
