摘要
PCM(Progress Control and Monitor)工艺过程监控,是半导体制造过程中的一个重要的环节.它主要是对制造过程中的集成电路或者器件芯片的电参数进行测量,反映出产品在制作过程中是否符合工艺要求以及存在哪些质量问题.文中简要分析了PCM测试系统的结构,重点探讨了PCM测试系统应用中保证测试精度和提高测试效率的方法.
PCM is an important part in the semiconductor manufacture process. It mainly measures the electrical parameters of integrated circuits or discrete devices in semiconductor manufacture. It reflects whether the products meet the design requirementand the quality related issues. This paper briefly analyzes PCM tester＇ s structure, and focuses on detailed issues which should be paid attention to while using the PCM tester, to ensure the precision and the efficiency of test.
出处
《微电子学与计算机》
CSCD
北大核心
2009年第6期166-170,174,共6页
Microelectronics & Computer
关键词
半导体制造
PCM测试机
测试精度
测试效率
semiconductor manufacture
PCM tester
measuring accuracy
measuring efficiency
