摘要
从ZnO薄膜的晶体结构、光学性能、电学性能、光电特性、气敏特性等方面综述了ZnO的研究重点和应用前景。
Research points and application prospects of ZnO film are reviewed in terms of its crystal structure, optical property, electrical property, photo-electricity and sensing properties.
出处
《真空与低温》
2009年第1期48-51,共4页
Vacuum and Cryogenics
关键词
ZNO薄膜
晶体结构
光电特性
气敏特性
ZnO film
crystal structure
photo-electricity
sensing properties
