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三维压电加速度传感器

On Three Dimensional Piezoelectric Accelerometer
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摘要 本文介绍了一种适于三维动态参数测量的压电加速度传感器。三维测量的实现,利用了PZT-5陶瓷的剪切和压缩特性。在要求用光纤传输测试信号时,可采用电荷放大器配合以电-光转换器耦合于光纤实现。使用光纤传输的目的在利用它的高绝缘性能,及不易受电磁场干扰等特点,以便适合于特殊场合下动态参数测试的应用。 本文根据传感器的力学模型推导了它在X,Y,Z方向的三维特性方程式,给出了系统三自由度灵敏度和频响测试结果以及它在对机床振动实测中的实验结果。 In this paper, a piezoeletric acceleromeier to measure for dyuamic para-metres of 3 dimensions is introduced. By the fullest use of the shear/compression properties of PZT-5 ceramic piece, the acceleromefer has been carried out. As the measureing signals transited with photo-fiber by request, which may use the charge-amplifier logather with electric/photo converter and couple to photo-fiber. In this condition, if would be isolating the electricity and free from a strong electromagnetic field interference. This paper presents the operation equations on X-, Y-, and Z-axes, gives the test resulis of 3-dimensional sensitvties and frequency response, and experiment results of the machine tool with this device also.
机构地区 燕山大学
出处 《传感技术学报》 CAS CSCD 1989年第2期49-56,共8页 Chinese Journal of Sensors and Actuators
关键词 光纤耦合 压电传感器 测量精度 optical fiber coupling piezoelectric transducer measure accuracy
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