摘要
为了满足现代加工、检测技术的需求,能够在较大的行程范围内,实现超精密定位,研制了一种新型的基于压电陶瓷驱动的大行程高精度微驱动系统。通过模块化方法,分别建立微驱动系统驱动部分、传动部分的物理、数学模型,得到系统的传递函数。采用带有变速积分的模糊控制方法,对系统的运动特性进行仿真分析,结果表明,当跟踪连续的阶梯信号时,对比单独采用模糊控制策略的系统位移输出,误差由0.09μm下降到0.004μm,位移分辨率达到0.01μm。
A new micro actuator with large-stroke and high-resolution was proposed based on piezoelectric,which could obtain ultra-precision position in large-stroke.The physical and mathematical model of the drive unit and transmission unit was built respectively by the method of modularization,and the transfer function of the system was attained,which provided theoretical basis to establish control system.The simulation on the kinetic characteristic of the micro actuator system was carried out by the fuzzy control with speed change integral.The result shows that the error is reduced from 0.09μm for single fuzzy control to 0.004μm when tracking stairstep signal and the displacement resolution is up to 0.01μm.
出处
《系统仿真学报》
CAS
CSCD
北大核心
2009年第6期1553-1556,1561,共5页
Journal of System Simulation
关键词
微驱动器
变速积分
模糊控制
建模
仿真
micro actuator
speed change integral
fuzzy control
modeling
simulation
