摘要
RF MEMS开关是其各种组件、系统级应用中最基本的器件之一,具有低损耗、低功耗、线性化好、尺寸小及易集成等特点。对各种开关驱动机制的特点进行了比较,指出具体驱动机制的选取应符合实际应用的需求;在和传统pin开关、FET开关相比较的基础上,总结了RF MEMS开关的优缺点,概述了其目前的应用领域以及面临的主要问题;最后介绍了目前国内外RFMEMS开关研究状况。通过对国内外一些经典RF MEMS开关范例的简述,展望了RFMEMS开关未来的发展趋势。
The RF MEMS switch is one of the basic instruments in the module and system applications of RF MEMS, and has advantages including low loss, low power, excellent linearity, small size, easy integration. By comparing the features of all the driving mechanisms, the conclusion is obtained that the choice of the specific driving mechanism must meet the requirements of the practical application. Compared with the traditional pin and FET switches, the RF MEMS switch also has advantages and disadvantages. The recent application fields and the facing problems of RF MEMS switches are summarized. The researches and developments of RF MEMS switches at home and abroad are introduced. By describing the classical RF MEMS switches, the prospect and development trend in future are analyzed.
出处
《微纳电子技术》
CAS
2008年第11期647-653,共7页
Micronanoelectronic Technology
基金
安徽省高校自然科学重点科研计划项目(2006KJ026A)
