摘要
报道了悬臂梁接触式RF MEMS开关的设计、制作和测试结果。整个工艺采用表面微机械加工技术,利用正胶作为牺牲层。其中开关的悬臂梁采用了"三明治"式的结构,即上下两层为SiO2,中间夹着一层Cr/Au合金,这种结构可使梁合为一体,且具有很好的机械性能。对350μm长、200μm宽、1 7μm厚、且距底电极为2 5μm的悬臂梁开关进行测试,其驱动电压约为20V,在同类开关中是较低的。
Design, fabrication and test results of DC-contact Cantilever RF MEMS Series Switches are reported. The RF MEMS switches were fabricated via a surface micromachining process using photoresist as the sacrificial layer. The switch cantilever has a sandwich structure which includes two SiO layers and a hybrid Cr/Au metal layer. It has a integral body and gets a good mechanical performance. DC measurements indicate actuation voltage as low as 20 V is achieved. When the cantilever has 1.7 μm thick, 350 μm long, 200 μm wide and is suspended 2.5 μm above the substrate.
出处
《微细加工技术》
EI
2005年第1期71-74,共4页
Microfabrication Technology
