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氮化硅材料的ELID精密磨削试验研究

Experimental Research on ELID Precision Grinding of the Si3N4
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摘要 ELID(Electrolytic In-process Dressing)磨削技术是在电化学加工、电解磨削原理基础上发展起来的一项磨削新技术,是一种新型的在线连续修整磨削的方法.ELID磨削特别适合利用金属基金刚石微粉砂轮对脆硬难加工材料进行超精密镜面磨削加工.本文通过对三块热压氮化硅工件的ELID磨削试验,基于LABVIEW数采系统进行实时监测和分析处理数据,利用砂轮和阴极的极间电流表征钝化膜状态,获得了在不同平衡电流条件下的ELID磨削效果.试验结果表明:在一定范围内,ELID磨削的钝化膜的厚度越大、致密性越好,磨削质量就越高. ELID (Electrolytic In-process dressing) grinding is new technology based on Electrochemistry dressing and Electrolysis grinding; it is a kind of new-type repairing and grinding method in succession on- line. ELID is just suitable for utilizing the metal-bonded fine grain diamond wheel to process the ultra-pre- cision surface dressing of the hard and brittle materials. Different are obtained through three pieces of hot pressing Si3N4 materials with ELID grinding experiment. The real-time monitoring and analysis are done with the data acquisition system based on LABVIEW and under different balance electric current conditions. Within the specific limits, the thicker the passivation membrane is, the better the grinding quality is.
出处 《湖南工程学院学报(自然科学版)》 2008年第2期26-29,共4页 Journal of Hunan Institute of Engineering(Natural Science Edition)
关键词 数采系统 钝化膜 平衡电流 氮化硅 data acquisition systems passivation membrane balance electric current Si3N4.
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