摘要
比较了快速热处理、传统热处理、快速与传统结合热处理镧钛酸铅铁电薄膜的微观形貌、介电、铁电性能、Ｉ－Ｖ以及Ｃ－Ｖ特性。讨论了不同热处理工艺的特点。研究表明，快速与传统结合热处理薄膜具有较大的晶粒尺寸和较大的剩余极化强度，Ｉ－Ｖ特性偏离欧姆定律，具有压敏电阻特性，Ｃ－Ｖ曲线具有较尖锐的非线性峰。
Morphologies,dielectric and ferroelectric properties,current voltage ( I V ) and capacitance voltage( C V ) characteristics of lead lanthanum titanate thin films annealed by rapid thermal annealing (RTA) process,conventional furnace annealing(CFA) process and thermal annealing process of combination RTA with CFA(RCA) were compared.The features of each thermal annealing process were discussed.The Reseach results show that:the films annealed by RCA process have larger grain size and remnant polarization,the I V dependence deviated from Ohm′s law, C V curve shows sharper nonlinearity peaks.
出处
《压电与声光》
CAS
CSCD
北大核心
1997年第6期409-414,共6页
Piezoelectrics & Acoustooptics
基金
国家教委留学回国人员科研经费
关键词
铁电薄膜
热处理工艺
C-V特性
I-V特性
铁电体
ferroelectric thin film,thermal annealing process,current voltage characteristic,capacitance voltage characteristic
