摘要
简要叙述了声表面波(SAW)化学战剂传感器的传感原理和研究进展。详细阐述了高Q低插损SAW振荡电路的设计、敏感膜材料和成膜技术的研究进展,指出了SAW化学战剂传感器发展的趋势。
The surface acoustic wave （SAW）chemical warfare agent sensor is briefly discussed in theory and research progress. The design of high Q and low insertion loss （IL） SAW oscillator, research of chemical sensing film and process of film are detailed expatiated. The future development of SAW chemical warfare agent sensor is forecasted.
出处
《传感器与微系统》
CSCD
北大核心
2008年第9期1-3,共3页
Transducer and Microsystem Technologies
关键词
声表面波
化学传感器
敏感膜
surface acoustic wave（SAW）
chemical sensor
sensing film
