摘要
分析了我国以往电子气体的现状,介绍目前国外发达国家电子气体研发的具体做法,对未来我国电子气体的发展提出新的想法。
Analyzed the formerly statue of electronic gases in our country, introduced the concrete conditions for the R＆D of electronic gases in developed countries at present, advanced a new proposal to the development of electronic gases in our country in the future.
出处
《低温与特气》
CAS
2008年第4期1-5,共5页
Low Temperature and Specialty Gases
关键词
电子气体
砷烷
硅烷
合成
净化
分析
electronic gases
arsine
silane
synthesis
purification
analysis
