期刊文献+

纳秒脉冲电流提高微细电化学加工精度的研究 被引量:3

Research on Improving the Machining Accuracy of Micro-ECM by Nanosecond Pulse Current
下载PDF
导出
摘要 分析了电极反应的暂态过程,探讨了超短脉冲电流提高电化学加工精度的机理,并根据法拉第定律和巴特勒伏尔摩方程建立了电化学暂态加工的数学模型。在微细电化学加工系统中,采用纳秒级的超短脉冲电流,通过加工试验验证了理论分析,加工出了直径为20μm的微小孔。 According to the transient process of electrochemical reactions, the mechanism of that ultra--short pulse current can improve the machining accuracy of ECM was investigated. And the theoretical model of ECM transient process was developed based on the Faraday' law and Butler-- Volmer equation. The theoretical analysis was verified with the subsequent machining experiments. Using the application of nanosecond pulse current, the micro--hole with 20μm in diameter is machined in the micro--ECM experimental system.
作者 张朝阳 朱荻
出处 《中国机械工程》 EI CAS CSCD 北大核心 2008年第14期1716-1719,1723,共5页 China Mechanical Engineering
基金 国家自然科学基金资助重点项目(50635040)
关键词 微细电化学加工 纳秒脉冲电流 理论模型 加工精度 micro-- ECM nanosecond pulse current theoretical model machining accuracy
  • 相关文献

参考文献7

  • 1Bhattacharyya B, Munda J, Malapati M. Advancement in Electrochemical Micro--machining[J]. International Journal of Machine Tools & Manufacture,2004,44(15) :1577-1589. 被引量:1
  • 2Forster R, Schoth A, Menz W. Micro- ECM for Production of Microsystems with a High Aspect Ratio [J]. Microsystem Technologies, 2005,11(4/5):246-249. 被引量:1
  • 3Kim B H,Na C W, Lee Y S, et al. Micro Electrochemical Machining of 3D Micro Structure Using Dilute Sulfuric Acid[J]. CIRP Annals -- manufacturing Technology, 2005,54 (1) : 191-194. 被引量:1
  • 4Kenney J A, Hwanga G S, Shin W. Two--dimensional Computational Model for Electrochemical Micromachining with Ultrashort Voltage Pulses[J]. Applied Physics Letters, 2004,84 (19) :3774- 3776. 被引量:1
  • 5Bard A J,Faulkner L R. Electrochemical Methods: Fundamentals and Applications [M]. New York: Wiley, 1980. 被引量:1
  • 6张朝阳,朱荻,王明环.纳秒脉冲微细电化学加工的理论及试验[J].机械工程学报,2007,43(1):208-213. 被引量:24
  • 7Schuster R, Kirchiner V, Allongue P, et al. Electrochemical Micromachining [J]. Science, 2000, 289 : 98-101. 被引量:1

二级参考文献8

  • 1张朝阳,朱荻,王明环,曲宁松.超短脉冲电流微细电解加工技术研究[J].中国机械工程,2005,16(14):1295-1298. 被引量:14
  • 2李小海,王振龙,赵万生.高频窄脉冲电流微细电解加工[J].机械工程学报,2006,42(1):162-167. 被引量:28
  • 3WOLFGANG E.Electrochemistry and Microsystems[J].Electrochimica Acta,2003,48(20-22):2 857-2 868. 被引量:1
  • 4SCHUSTER R,KIRCHINER V,ALLONGUE P,et al.Electrochemical micromachining[J].Science,2000,289(5 476):98-101. 被引量:1
  • 5TRIMMER A L,HUDSON J L,KOCK M,et al.Singlestep electrochemical machining of complex nanostructures with ultrashort voltage pulses[J].Applied Physics Letters,2003,82(19):3 327-3 329. 被引量:1
  • 6KIM B H,RYUA S H,CHOI D K,et al.Micro electrochemical milling[J].Journal of Micromechanics and Microengineering,2005,15(1):124-129. 被引量:1
  • 7LIM Y M,KIM S H.An electrochemical fabrication method foe extremely thin cylindrical micropin[J].International Journal of Machine Tools & Manufacture,2001,41(15):2 287-2 296. 被引量:1
  • 8KOCK M,KIRCHNER V,SCHUSTER R.Electrochemical micromachining with ultrashort voltage pulses-a versatile method with lithographical precision[J].Electrochimica Acta,2003,48(20-22):3 213-3 219. 被引量:1

共引文献23

同被引文献21

引证文献3

二级引证文献7

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部