摘要
高Q值的片上集成电感是单片集成射频电路、微波电路中不可缺少的重要元件。衬底损耗、金属损耗及电感螺旋线之间磁通量的相互抵消是限制集成电感品质的主要因素。首次提出了一种利用常规硅工艺实现的新型立体集成电感设计,先在介质层上刻蚀出一个锥形柱面,然后在凹面上镀金属层,利用平面螺旋电感的制造方法,就可制造出立体电感;分析了该集成电感在金属损耗及电感螺旋线之间磁通量的相互抵消等多方面的优势;提出了该型集成电感的两种仿真模型;利用ASITIC软件近似仿真发现该型集成电感能获得较高Q值。
High-Q spiral On-Chip Integrated inductors are indispensability and important component in RF and microwave fields. Substrate losses, metal losses and the cancellation of magnetic flux between the spiral lines were commonly recognized for the main reasons for low quality factor of the spiral inductors. Firstly propose a novel design of solid spiral inductor which based on implemented in conventional Si process. Erode a taper on the medium layer first, then plate a metal layer on the taper surface, we can make the solid spiral inductor by the method of manufacture spiral inductor. Analyze the advantage of this kind solid spiral inductor from metal losses and the cancellation of magnetic flux between the spiral lines. Propose two kind model for simulate of this kind spiral inductor. We found that this kind solid spiral inductor can gain higher quality factor by ASITIC simulator.
出处
《衡阳师范学院学报》
2008年第3期49-52,共4页
Journal of Hengyang Normal University
基金
衡阳市科学技术局科技计划资助项目(2007KJ036)
关键词
螺旋电感
品质因子
磁通量
衬底损耗
金属损耗
spiral inductor
quality factor
magnetic flux
substrate loss
metal loss
