摘要
对洁净室内分子级污染物(AMC)的分类、取样监测方法以及针对不同制程所采用通用的污染控制方法进行了较为全面的归纳和总结。对不同类型的污染源头进行分类识别,并举出实例,给出了几种控制污染的方法。分析了具体问题的实际情况,讨论了主要的污染源及具体产品的环境控制要求,以找到最合理、有效的处理方法。
The categories, sampling, monitoring and controlling for different processes of airborne molecular contamination (AMC) were summarized. Different types of contamination sources were identified with some examples. Several control methods were given, the specific issues at different actual situations were analyzed, the main contamination sources and the environmental control requirements for were discussed to find out the most reasonable and effective ways to deal with.
出处
《半导体技术》
CAS
CSCD
北大核心
2008年第6期495-496,500,共3页
Semiconductor Technology
关键词
洁净室
分子级污染物
污染控制方法
监测
clean room
AMC
contamination control method
monitoring specific products