摘要
提出了一种新型的翘板式静电射频微系统开关，给出了理论模拟，结构分析结果和工艺制作方法。该结构采用了5μm厚的无应力单晶硅作为开关的可动部分，可以缓解薄膜应力变形。翘板式结构解决了传统静电设计中动作力弱的问题，并且通过调整支点解决了开关回复力不可调的难题。利用该结构可以在保持高隔离度的同时使驱动电压降低，有限元理论模拟驱动电压为5～10V；采用翘板式结构增加了开关的使用周期，而且结构自身具有单刀双掷特点，可以直接应用于高频通信的频道选择。给出了开关共面波导传输线的测试结果和设计讨论。
The simulation, design and fabrication of a seesaw type radio-frequency microelectromechanical system switch were proposed. The switch utilizes the single crystal silicon as the movable parts to realize flexible restoring forces and improve the stress deformation of the film. The seesaw structure resolves the problem of a small contacting force in the traditional electrostatic switch and makes the restoring force adjustable by controlling the fulcrum. It can be used to lower the actuation voltage with the high isolation maintaining and the simulated switching voltage is 5- 10 V. The switch can be directly applied to radio-frequency communications channel selection with its single pole double throw （SPDT） feature. Finally, the results and discussion of the microwave measurement on coplanar waveguide （CPW） structure were presented.
出处
《微纳电子技术》
CAS
2008年第5期282-286,共5页
Micronanoelectronic Technology
基金
中国科学院微电子所所长基金项目(06SF021002)
关键词
射频开关
单晶硅
微机电系统(MEMS)
静电驱动
驱动电压
共面波导(CPW)
radio-frequecy （RF） switch
single crystal silicon
microelectromechanical system （MEMS）
electrostatic actuation
actuatin voltage
coplanar waveguide （CPW）
