摘要
提出了一种利用悬梁式热感应薄膜阵列、衍射光栅和图像重建技术来实现高灵敏光学读出红外成像的装置和方法。与传统的光学读出红外成像技术相比,该装置采用彩色CCD设计来提高系统灵敏度,具有结构简单、成本低廉的优越性,适用于对速度指标要求不高的应用领域。制备了试验结构并进行了红外测试,证明在人体红外信号作用下,悬臂自由端能产生较大幅度的偏转,随之彩色CCD读出了全可见光波长范围的颜色变化。经估算,系统的噪声等效温度差大大超过目前200mK的水平。
An optical readout IR imaging apparatus based on hang hot induction thin film array, diffract grating and image regeneration was introduced. Compared with the traditional technology, the sensitivity of this IR sensor is improved by colored CCD. Simple in structure and low in cost, this IR sensor can be applied in the low speed index request fields. An experiment structure was established and an infrared test was made. The test shows that the cantilever array provided about 8.0 degree rota tion with the IR signal from human body, then that colored CCD read the light covering all the visible range. High sensitivity and low noise equivalent temperature difference （NETD） of the system were demonstrated.
出处
《微纳电子技术》
CAS
2008年第1期38-44,共7页
Micronanoelectronic Technology
关键词
微机电系统
光学读出热成像
衍射光栅
图像重建
microelectromechanical system （MEMS）
optic readable thermal imaging
diffract grating
regeneration image
