摘要
无声放电等离子体是一种非平衡态等离子体，它可用于等离子体化学、紫外与真空紫外光源以及气体激光器激励等方面。本文将概要介绍无声放电及其应用的研究进展。
Silent discharge plsama is a kind of un equilibrium plasma, it can be used for a series of fields such as plasma chemistry, UV and UVU light source and excitation of gas lasers, etc. The advance on research of the silent discharge and its application will be introduced briefly in this paper.
出处
《电子器件》
EI
CAS
1997年第3期8-19,共12页
Chinese Journal of Electron Devices
关键词
无声放电
低温等离子体
气体放电
silent discharge low temperature plasma gas discharge
