摘要
简单介绍了钛泵的工作原理。溅射离子泵在高电压和高磁场的作用下产生潘宁放电,吸附容器内气体分子达到真空的目的。由于设备老化或操作不当等原因,溅射离子泵会发生各种故障。本文列举了溅射离子泵的各种常见故障,根据工作机理分析了溅射离子泵发生故障的原因,并介绍了排除故障和维护保养的方法。对于钛泵的操作使用人员和维修人员具有一定的借鉴意义。
Describes briefly the construction and operating principle of titanium getter pump. As a sputter-ion pump, the titanium getter pump can cause Penning discharge under the action of high voltage and high-intensity magnetic field to adsorb the gas molecules in a container so as to acquire vacuum. However, different faults will be found on the getter pump because of aged equipment or improper operation. Those troubles which are often found on titanium getter pumps are exemptified, with the relevant causes, necessary maintenance and trouble-shootings given for reference.
出处
《真空》
CAS
北大核心
2008年第2期34-37,共4页
Vacuum
关键词
钛泵
溅射离子泵
潘宁放电
故障
真空
titanium getter pump
sputter ion pump
Penning discharge
fault
vacuum
