摘要
本文研究了用近平行的入射X射线,以掠入射的方式,利用薄膜下基体某一晶面衍射强度随掠入射角的变化关系来测定薄膜厚的方法。导出了基体某一晶面的衍射强度的对数InIr与掠入射角函数f(r)之间的线性关系,发现该直线的斜率即为薄膜的线吸收系数与其厚度的乘积。对WC-Co硬质合金上的金刚石薄膜厚度进行了测定,并对该方法的重复性进行了验证。结果表明,InIr与f(r)之间的具有很好的线性相关性,而且该方法具有较好的精确性。
In this paper, a method for determining the thickness of diamond films has been developed by using grazing incidence X-ray technique. It is based on the variation of diffraction intensities from a crystal plane of the substrate at different grazing angles. A linear relation between the logarithm of the differction intensities from the substrate InL and the grazing incidence angle function f（r） was deduced, and the slope of the line is just the product of linear absorption coefficient of the thin film and its thickness. The thickness of a diamond thin film on cemented carbide WC-Co has been tested, and the repeatability of this method was investigated. Results show that there is a good linear correlation between InL and f（r）, and that this method has high precision.
出处
《物理测试》
CAS
2007年第4期8-11,共4页
Physics Examination and Testing
关键词
掠入射X射线衍射
金刚石薄膜
厚度测定
grazing incidence X-ray diffraction~ diamond thin film
thickness determination
