摘要
针对钛合金耐磨性差、易吸氢而产生氢脆的特点,采用双辉无氢渗碳的方法对钛合金进行表面渗碳处理,在钛合金表面形成了含有高硬度TiC相的表面合金层。影响渗碳效果的诸多因素中,碳离子的产生、输运及在钛合金表面的吸附对渗碳效果起着决定性作用。粒子间存在着频繁的碰撞,在负偏压的作用下集体向阴极漂移,并有绕射现象。
Against titanium alloys drawbacks of poor wear resistance and easy producing hydrogen brittleness, a hydrogen- free carburizing on the surface titanium alloy had been carried out using double glow plasma alloying technique. The alloy layer contains a highly hardness phase of TiC and contributed special physics and chemistry properties. The producing, transporting of carbon ions as well as absorbing by titanium alloy surface plays a very important role in the plasma carburization. The ions continual collapsed each other frequently. The plasma immigrated toward the cathode collectively with the help of negative bias voltage. The diffraction phenomena had also been observed. It was also found that less difference between cathode voltage and source voltage or higher pressure resulted in a remarkable diffraction.
出处
《电子工艺技术》
2007年第5期253-256,共4页
Electronics Process Technology
基金
山西省自然科学基金项目(项目编号:20041059)
浙江省科技厅重点项目(项目编号:2007C21139)
关键词
双辉
钛合金
无氢渗碳
等离子体
Double glow
Hydrogen - free carburizing
Titanium alloy
Plasma transport
