摘要
以轮式陀螺仪为研究对象,利用有限元方法分析了主要结构尺寸对其固有频率的影响。根据驱动模态和敏感模态的频率匹配,优化了陀螺的结构尺寸;通过谐响应分析确定了频率和振幅的关系,为结构设计和制备工艺提供了理论指导。
The effect of primary structural dimensions on natural frequency of the vibrating wheel micro mechanical gyroscope was studied using finite element method （FEM） analysis. According to the match between drive mode frequency and sensing mode frequency, the structure dimensions of gyroscope were optimized. The relation between frequency and vibrating amplitude were researched by means of harmonic analysis, which provides help for structure design and fabrication process.
出处
《微纳电子技术》
CAS
2007年第7期150-152,164,共4页
Micronanoelectronic Technology
基金
国家自然科学基金资助项目(50535053
50475085)
教育部"新世纪优秀人才支持计划"资助项目(NCET-05-0842)
