摘要
用真空蒸发和自然氧化法在玻璃基底上制备了Ti/TiO2多层膜,并检测了薄膜的光电性能。电性能检测表明Ti/TiO2多层膜存在类负阻效应,多层膜的层间的类负阻效应比表面的更明显,薄膜的层间电阻率高于表面电阻率;用分光光度计测得试样退火前后的透射谱;用X射线衍射仪和扫描电镜检测了Ti/TiO2多层膜的晶体结构和表面形貌。
Ti/TiO2 multilayer films were prepared on glass substrate by vacuum evaporation and natural oxidation with their optical and electrical properties tested. The results showed that the films have near negative resistance effect which is found more obvious between layers than on film surface, and the interlayer resistivity is higher than surface resistivity. The transmittance spectra of the film specimens before and after annealing were obtained by a spectrophotometer. The crystal structure and surface morphology of Ti/TiO2 multilayer films were examined by XRD and SEM.
出处
《真空》
CAS
北大核心
2007年第4期29-32,共4页
Vacuum
关键词
Ti/TiO2多层膜
真空蒸发
类负阻效应
光电性能
Ti/TiO2 multilayer film
vacuum evaporation
near negative resistance effect
optical and electrical properties
