摘要
文章针对双光路膜厚监控原理,设计了双锁相放大电路、复合滤波处理和数字判断等一套微弱信号优化处理方案,并在VC++6.0集成开发环境下进行自动化监控。实验结果表明:膜厚监控系统的低反射率膜的反射率显示分辨极限为0.02%,膜厚控制的标准偏差为0.55%;软件控制系统工作可靠,界面设计友好,人机互动性强,图标和状态指示器等特色界面丰富了界面功能和方便了用户。在对监控信号的高稳定和高精度检测基础上用VC实现了镀膜全部工艺过程的自动化,并且性能价格比优于同类镀膜设备系统。
An optimization processing system of faint photoelectric signals is designed according to the thin-film thickness monitoring（TFTM） principle of dual-light beams. The system adopts the dual-lock-phase circuit and the compound filter and has the function of digital judgement. Then an automated TFTM system is developed based on VC＋＋6.0. Experiment results show that the display resolution limit of the TFTM system on lower reflectivity is 0.02 % and the standard deviation of TFTM is 0.55 %. The software system can run steadily and has amicable program interfaces and high ability of man-machine interaction. The characteristic interfaces of the pattern-title and status indication enrich the interface and are convenient for users. Based on high precision of monitoring signals and high measurement stability, all auto-monitoring functions of depositing optical thin-film are achieved with VC. The performance-cost ratio of the presented TFTM system is superior to the similar coaters.
出处
《合肥工业大学学报（自然科学版）》
CAS
CSCD
北大核心
2007年第6期723-726,共4页
Journal of Hefei University of Technology：Natural Science
基金
陕西省教育厅专项科研计划资助项目(06JK283)
兵器工业科研基金资助项目(ZZ9682-3)
关键词
薄膜光学
监控系统
VC++
复合滤波
数字判断
双光束
film optics
monitoring system
VC＋＋
compound filter
digital judgement
dual-light beam
