摘要
将聚酰亚胺作为绝热材料,对传统室温微测辐射热计结构进行了改进,成功制备了非晶硅室温微测辐射热计并进行了测试。以聚合物材料作为绝热材料,避免了表面牺牲层工艺和体加工技术,降低了成本、提高了成品率。在传统探测器结构基础上,在底部制备一层金属用作红外反射层,利用吸收层可以对红外辐射进行二次吸收。金属层和有源层间的隔离层对红外也有很好的吸收效果,由隔离层、有源层和钝化层构成三明治结构,可以显著改善对红外辐射的吸收。对器件的制备工艺进行了说明并对器件特性进行了测试,结果表明,在773K黑体源8～14μm红外辐射下,探测器的响应度最大为26.4kV/W,表明器件具有较高的性能。
Taking polyimide as thermal-isolation material, the conventional room temperature rnicrobolometer structure is improved and a-Si：H room temperature rnicrobolometer is fabricated and tested successfully. Instead of surface sacrificial layer and bulk micromachining technique, using polymer as thermal isolation material decreases cost and improves yield. Based on the conventional structure, a bottom reflective metal layer is added to absorb infrared radiation twice. The unique sandwich structure which contains segregation layer between the metal and the active layer, and upper layers improve the infrared absorption obsiously, mean while the segregation layer decreases thermal conductance of the sensor. The process is described and the performance is tested in details.The results show that the maximum responsibility of 26.4 kV/W is achieved on 773 K black body infrared radiation with wavelength of 8-14μm.
出处
《红外与激光工程》
EI
CSCD
北大核心
2007年第3期329-332,共4页
Infrared and Laser Engineering
