摘要
提出了一种新型高灵敏度横向电容式硅微加速度计．根据差分电容极板间正对面积的改变来检测加速度大小,保证输出电压与加速度之间的线性度．系统刚度可由静电力调节．为了提高电学灵敏度,在检测电容极板上设计高K介质层,增大了检测电容量,减小了杂散电容的影响．使用CoventorWare对本设计进行机械分析、力电耦合分析和模态分析,仿真结果与理论计算相吻合．加速度计使用简单的表面牺牲层工艺即可完成,具有很好的发展前景．
A novel lateral sensing capacitive silicon accelerometer, having tunable stiffness by the electrostatic force, is proposed. The acceleration is measured by modifying the effective overlap area of a differential capacitor pair and the linearity between output voltage and acceleration is ensured. To further improve the sensitivity, high K dielectric layer is introduced to increase the sensing capacitance. Mechanical analysis, mechanical-electrical coupled analysis and modal analysis are carried out with CoventorWare. The simulation results are matched very well with the theoretical prediction. It is a simple surface micromaching fabrication flow to set up the accelero-meter with a good future.
出处
《纳米技术与精密工程》
CAS
CSCD
2005年第4期283-289,共7页
Nanotechnology and Precision Engineering
