摘要
从对硅微加速度计的材料特性、微结构特性研究着手,通过对现有类型加速度计进行分析与整合,设计出一种新的硅微结构及与之匹配的微检测电路,最后通过仿真表明该加速度计具有良好的功能特性.
In this paper, the first part is the analysis of the characteristics of material and microstructure of micromachined silicon accelerometer, then a new silicon microstructure is designed on the basis of several type of micromachined silicon accelerometer in being. Besides, a micro-electronics detecting circuit is designed to match the microstructure. In the end, the result of simulation indicates that this accelerometer is of a proper function.
出处
《沈阳工业学院学报》
2004年第4期31-34,30,共5页
Journal of Shenyang Institute of Technology
