摘要
针对侵彻武器测试过程中冲击过载大和频率范围宽的特点,提出了一种微机械电容式加速度计结构,结构中采用分布在整个芯片上的小电容阵列来代替位于中间的单个大电容器。利用ANSYS对加速度计进行了仿真分析,得出加速度计的固有频率超过600 kHz,抗过载能力超过200 000g,且电容变化量大,灵敏度高。文中还给出了加速度计芯片的加工工艺流程和接口电路。
The high penetrator weapon, overload and wide frequency response will be produced in the process of irruption of so a micromachined capacitance accelerometer is brought forward to measure its over-loading parameters. The structure of the accelerometer adopts an array of small capacitors in the top wafer rather than a big capacitor in the center. Using FEM simulation by ANSYS, the results show that the natural frequency of accelerometer is more than 600KHz, the maximum of overload measurement exceeds 200000g and the large capacitance variation makes the high sensitivity of accelerometer. Also the process sequence for the fabrication of accelerometer and measuring circuit are presented in this paper.
出处
《探测与控制学报》
CSCD
北大核心
2005年第5期30-33,36,共5页
Journal of Detection & Control
关键词
加速度
微机械
高g
有限元分析
accelerometer
micro - machine
high g
FEM analysis
