摘要
介绍一种压阻式压力传感器的设计原理和加工技术,设计出了敏感电路和硅膜结构,根据所设计压力传感器的结构特点和国内现有加工设备,采用了体硅加工技术和表面加工技术相结合的方法进行加工研究并给出了加工模型。
This paper introduces the study of low stress micro-sensor manufacturing and design principle. It pres- ents the methods combining both the bulk silicon micro-machining and surface sacrificial layer technology according to the domestic structures of the low stress micro-sensor with detailed manufacturing steps on this study.
出处
《仪表技术》
2007年第6期62-64,共3页
Instrumentation Technology
关键词
MEMS
压力传感器
加工工艺
光刻
腐蚀
扩散
MEMS
pressure sensor
processing technology
light scribe
erosion
diffusion
