摘要
说明了微机械电子隧道传感器的工作原理，分析了电子隧道传感器的优点。较系统地介绍了几种典型的微机械电子隧道传感器包括微机械电子隧道加速度计、红外探测器和磁强计等。
This paper describes the principle of the micromachined electron tunneling sensors,analyses the advantage of sensors based on electron tunneling,and systematically demonstrates several typical micromachined electron tunneling sensors,including micromachined electron tunneling accelerometers,infrared detectors and magnetometers.And briefly it introduces the research groups of this area in the world.
出处
《半导体情报》
1997年第2期23-27,共5页
Semiconductor Information
关键词
微机械
电子隧道
传感器
加速度计
红外探测器
Micromachine Electron tunneling Sensors Accelerometer Infrared detector Magnetometer
