摘要
在WO3粉体材料中加入催化剂(Pt,PtO2,Pd或PdCl2),于600℃烧结1 h制成旁热式厚膜可燃性气体敏感元件。采用静态电压测量法,研究了元件的加热功率与元件灵敏度(β)的关系以及催化剂对元件的响应–恢复时间的影响。结果表明:WO3基元件掺入质量分数为0.5%的催化剂,在加热功率为600 mW时,能提高元件的灵敏度2～10倍,元件的响应时间缩短63%～78%,恢复时间缩短84%～95%。。
The thick film combustible gas sensor with indirectly heat was prepared by mixing catalysts （Pt, PtO2, Pd and PdCl2） into WO3 and sintering for one hour at 600℃. Based on the static voltage measure method, the relationship between the heat power and the sensitivity of sensor was researched. And the effects of catalysts on response and recovery time of sensor were also determined. The results show that the sensitivities of WO3-based combustible gas sensor are increased 2-10 times by doping 0.5 % （mass fraction） catalysts at 600 mW heat power. Response time and recovery time of sensor are decreased respectively 63 %-78 % and 84 %-95 %.
出处
《电子元件与材料》
CAS
CSCD
北大核心
2007年第5期31-32,35,共3页
Electronic Components And Materials
基金
湖南省教育厅科研基金资助项目(05C578)
