摘要
采用柠檬酸盐法制备铌酸锂铁电薄膜。探讨了柠檬酸(CA)和乙二醇(EG)的用量、pH和水浴温度等工艺参数对溶胶性能的影响。采用XRD和TG-DTA研究了铌酸锂(LiNbO3)晶相的形成过程,用XRD和AFM对所制得薄膜的物相组成和表面形貌进行了表征。结果表明,当前驱体溶胶的pH为7.5,水浴温度大于80℃,n(CA)∶n(Li+Nb)=3∶1,n(CA)∶n(EG)=1∶2时,可以获得稳定性好的溶胶。薄膜经缓慢升温至800℃热处理,可以获得单相、表面光滑、晶粒大小均匀、晶粒大小为70 nm的LiNbO3铁电薄膜。
The citrate method was adopted to prepare LiNbO3 ferroelectric film. The in fluences of process parameters on the performance of the sol were investigated,such as the amount of citric acid （ CA） and ethylene glycol （ EG） ,pH value and water bath temperature etc.. The evolution of LiNbO3 crystal phase was studied by XRD and TG - DTA and the phase composition and surface morphology of the prepared film were characterized by XRD and AFM, respectively. The results showed that when the pH of the precursor sol was 7.5 ,water bath temperature was above 80 ℃ and n（ CA） ： n（ Li ＋ Nb） = 3： 1, n（ CA） ： n（ EG） = 1：2, the obtained sol was good in stability. After being treated by rising the temperature slowly to 800 ℃ ,the monophasic and smooth LiNbO3 ferroelectric films with an uniform crystal size of 70 nm,were obtained.
出处
《无机盐工业》
CAS
北大核心
2007年第4期20-22,共3页
Inorganic Chemicals Industry
基金
陕西科技大学科学研究基金(SUST-B14)
关键词
铌酸锂
铁电
薄膜
聚合物前驱体
柠檬酸
LiNbO3
ferroelectric
film
polymeric precursor
citric acid
