摘要
薄膜晶体管液晶显示器(thinfilmtransistor-liquidcrystaldisplay,TFT-LCD)的制造工艺是一个复杂的过程,各个环节都可能发生静电击穿(electrostaticdischarge,ESD)现象,导致TFT-LCD器件被破坏,极大地影响了良品率。本文根据薄膜晶体管(TFT)生产工艺的实际情况,阐述了产线里各类产品型号的ESD发生状况。在此基础上,对各种设计、工艺过程和工艺参数对ESD造成的影响进行了分析研究,为实际的生产提供了指导作用。
TFT-LCD produce is a complicated process, ESD phenomena can occurs among every process step, which cause TFT is destroyed and has a big bad effect to the product yield. This paper describe ESD phenomena in kinds of product model according to the fact of TFT produce. And then, analysis the mechanism that based on design and produce process, which provide a guide to producing practice.
出处
《现代显示》
2007年第3期59-63,42,共6页
Advanced Display
