摘要
微机电系统是典型的多领域复杂系统,需要一种能够将复杂组件和子系统紧密集成跨领域的通用建模和仿真方法.介绍了微机电系统设计和仿真的现状,给出了基于端口的多领域建模概念,分析了其建模基础和基于VHDL-AMS、键合图和线图的实现方法,并给出了组件层次仿真的实现方法.分析表明,基于端口的建模实现了多领域物理现象的统一描述,并通过界面与实现的分离,实现了自上而下的层次化建模,可用一种仿真语言和仿真器实现整个MEMS系统的建模与仿真.
MEMS are characterized as multi-domain and complex systems, A universal modeling and simulation method that integrate complex components and subsystems closely together are required. The paper introduced the state of arts of MEMS modeling and simulation, and presented the ported-based multi-domain modeling methods, then analyzed the modeling concept and implementing methods using VHDL-AMS, bond graphs and linear graphs, and presented the modeling approach in component level. It indicates that universal expression of multi-domain physics is realized in port-based modeling methods and top-down hierarchical modeling is achieved, and the modeling and simulation of whole MEMS can be done by only one modeling language and one simulator.
出处
《电子器件》
CAS
2007年第1期67-71,共5页
Chinese Journal of Electron Devices
基金
山东省科技发展计划重大课题资助(031110119)
