摘要
设计了一种基于节点法模拟的MEMS(Microelectromechanicalsystem)仿真软件,构思了该软件六模块的结构组成,并提出了前三块的具体实现方法,包括实现MEMS器件三维描述与节点单元提取的方法.结合加工工艺流程与参数,实现了从版图到三维立体结构的生成,并进而完成了节点单元的提取.论文详细讨论了版图解释、矩形分割、两维版图到三维结构的转换、节点划分和提取等几部分的程序流程及核心算法.以MEMS梳状谐振器为例介绍了相关的算法、过程,均可获得正确的图形输出结果.
A kind of MEMS（Microelectromechanical system） emulational software which is based on nodal method simulation is devised with its basic structure of six modules. The detailed realization methods of the first three modules are presented, including methods for three-dimensional description of MEMS device and extraction of nodal element. With process flows and parameters, generation from layout to three-dimensional solid structure is realized and extraction of nodal element is then implemented. Some program flows and kernel algorithms of layout explanation, rectangle partition, conversion from two-dimensional layout to three-dimensional structure, nodal element compartmentalization and extraction have been illustrated detailedly. A MEMS comb-drive resonator is used for introducing related algorithms,procedures and all graphic output are correct.
出处
《传感技术学报》
CAS
CSCD
北大核心
2007年第2期302-307,共6页
Chinese Journal of Sensors and Actuators
基金
国家杰出青年科学基金资助(50325519)
关键词
MEMS器件
节点法
三维结构
提取算法
版图
MEMS device
nodal method
three-dimensional structure extraction algorithm
layout
