摘要
为了优化GaAs光电阴极制备工艺，设计了一个用于GaAs光电阴极制备过程监控的多信息量测试系统。系统采用了先进的现场总线技术，可在线测试阴极加热净化过程中真空度随温度的变化曲线，阴极激活过程中光电流、真空度、Cs源和O源电流的变化曲线，以及阴极激活后的光谱响应曲线。光电流测试精度可达1nA，光谱响应曲线测量范围在400～1000nm。利用该系统对阴极制备过程进行了监测，并给出了测试结果。
To optimize GaAs photocathode preparation techniques, a multi-information measurement system used to monitor GaAs photocathode preparation has been designed. The system based on advanced field bus technology can be used to measure vacuum degree curve vs. temperature during heat cleaning process, photocurrent, vacuum degree, and currents of Cs and O resources during activation process, and spectral response curve after photocathode activation. Measurement precision of photocurrent is 1 nA, and measurement range of spectral response curve is within 400～1 000 nm. GaAs photocathode preparation process can be monitored by using this system, and multi-information measurement results are obtained.
出处
《半导体光电》
EI
CAS
CSCD
北大核心
2006年第5期582-585,共4页
Semiconductor Optoelectronics
基金
教育部高等学校博士点基金资助项目(20050288010)
