摘要
研究了MEMS器件结构参数的自动优化算法及其实现技术.以悬臂梁的谐振频率指标为例,通过TSPICE软件,模拟其在给定初始结构参数下的谐振频率,算法自动完成指标分析并选取适当的修正步长,采用恰当的参数修正算法对器件结构参数进行优化,通过循环迭代直至满足用户频率指标和精度指标要求.最后采用CoventorWare软件对优化结果进行了验证.
The automatic optimization algorithms of structural parameters of MEMS devices are studied. Take the figure of resonance frequency of the cantilever beam as an example, the resonance frequency with given parameter are simulated by TSPICE, the algorithm accomplishes the analysis of figure automatically and optimizes the parameters by an appropriate method. To satisfy the consumer＇s requests of frequency and precision, circulative iterations are done. Finally, the results of optimization are verified by CoventorWare.
出处
《传感技术学报》
CAS
CSCD
北大核心
2006年第05A期1372-1375,共4页
Chinese Journal of Sensors and Actuators
基金
国家杰出青年科学基金资助项目(50325519)
关键词
MEMS器件
自动优化算法
结构参数
悬臂梁
MEMS devices
algorithms of automatic optimization
structural parameters
cantilever beam
