摘要
研究了MEMS器件结构参数的自动优化算法及其实现技术.以固支梁的谐振频率指标为例,通过HSPICE模拟软件,模拟其在给定结构参数下的谐振频率,算法自动完成指标分析并选取适当的修正步长,采用恰当的参数修正方法对器件进行优化,通过循环迭代直至满足用户频率指标和精度指标(5%)要求.最后采用Coventor Ware软件对优化结果进行了验证.
The automatic optimization algorithms of structural parameters of MEMS devices are studied.Taking the figure of resonance frequency of the clamped-clamped beam as an example,the resonance frequency with given parameter is simulated by HSPICE.The algorithm accomplishes the analysis of figure automatically and optimizes the parameters by an appropriate method.To satisfy the consumer's requests of frequency and precision(5%),circulative iterations are done.Finally,the results of optimization are verified by Co...
出处
《电子器件》
CAS
2007年第2期554-556,562,共4页
Chinese Journal of Electron Devices
关键词
MEMS器件
自动优化算法
结构参数
固支梁
MEMS devices
algorithms of automatic optimization
structural parameters
clamped-clamped beam
