摘要
给出三波长光干涉测量纳米级薄膜厚度的方法。通过对某负压磁头/玻璃盘空气薄膜的测试表明:三波长光干涉法具有精度高、容易实施等优点,能够满足磁盘/磁头润滑副设计、制造及研究的需要。
The three-wavelength optical interferometric method was presented to measure the thickness of the nano-scale thin film. The thickness of a point on the gas film between a head and a spinning glass disk was measured and analyzed. The measurement results show that the three-wavelength optical interferernetric method is of high precision and easy to be put into practice. The method can meet the requirements of lubrication design, research and development, as well as production of magnetic heads.
出处
《润滑与密封》
CAS
CSCD
北大核心
2006年第8期8-10,14,共4页
Lubrication Engineering
基金
国家重点基础研究发展计划资助项目(2003CB716205)
关键词
三波长
光干涉法
薄膜测量
磁头
three-wavelength
optical interferometric method
thin film measure
magnetic head
