摘要
基于厚膜传感技术研制出双电容陶瓷压力传感器,设计了一种具有高检测灵敏度的信号处理电路,详细阐述了双电容传感器感压元件的工作原理、结构设计、工艺制备方法及性能测试。实验结果表明:研制的传感器线性误差小于0.37%,迟滞误差小于0.3%,电容温度系数低于97×10-6/℃.
A dual-capacity ceramic pressure sensor was researched based on the thick film sensor technology. At the same time, a high pricise signal processing circuit was designed, the basic principle,fabric design,manufacturing technique and performance test of dual-capacity pressure-sensitive component were described in detail. Experimental results indicate that the sensor has many merits such as： the non-linearity error and hysteresis error are within 0.37% and 0.3% ,the temperature coefficient of eapaeity（TCC） is under 97 10^-6/℃.
出处
《仪表技术与传感器》
CSCD
北大核心
2006年第7期3-5,共3页
Instrument Technique and Sensor
基金
安徽省"十五"科技攻关计划(040120503)
关键词
厚膜技术
双电容
压力传感器
thick film technology
dual-capacity
pressure sensor
