摘要
对大曲率半径(即长焦距)金属基底凹面光栅的机械刻划技术做了研究。为了刻制长焦距凹面光栅,设计和研制了弹性顶针式光栅刻划刀刀架,它具有适用于刻划平面光栅和长焦距凹面光栅的双重功能。给出了描述光栅刻划刀圆弧形刀刃曲率半径与凹面光栅曲率半径、光栅口径、金刚石刀头横向尺寸之间关系的数学表达式,理论分析了光栅刻划刀圆弧形刀刃曲率半径的取值范围,研制了10.6μm激光系统用曲率半径为30 m的凹面金属光栅。检验结果表明,光栅的槽形质量较好,光栅的衍射效率可达96.8%以上。
The rul cal length） was st ng technique for concave metal grating with long curvature radius （namely long foudied. In order to rule the concave grating with a long focal length, a cutter frame with elastic thimble mode was designed and manufactured. It is available not only to plane grating, but also to concave grating with a long focal length. The mathematic expression of the relationship between the curvature radius of circular arc cutting edge of ruling tools for grating and the curvature radius of concave grating, the caliber of grating and the size of transverse direction of bit tool was given. The span of curvature radius of circular arc cutting edge was analyzed theoretically and the concave metal grating with curvature radius of 30 m for 10.6μm laser system was manufactured. The testing results show that the quality of groove is preferable, and the diffraction efficiency is more than 96.8 percent.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2006年第3期391-395,共5页
Optics and Precision Engineering
基金
国家自然科学基金资助项目(No.60478034)
关键词
红外激光
凹面光栅
光栅刻划刀
刀架结构
IR laser
concave grating
ruling tool for grating
cutter frame structure
