摘要
本文研究了液晶显示器件(LCD)正型光致抗蚀剂用感光树脂(PAC)所需接枝母体和2,1,5-重氮萘醌磺酰氯(NDQ)对正型光致抗蚀剂应用性能的影响。结果表明:不同的接枝母体,对正型光致抗蚀剂的分辨率、抗碱性、感光速度有一定影响;NDQ导入率的提高,导致PAC的抑溶效应增大;PAC与NDQ混合使用在特定条件下可以提高正型光致抗蚀剂的感光速度。
This paper focuses on the positive photoresist＇s application performance influence that the graft matrix and 2,1,5- sulfonylchloride（2-azo-1-naphthoquinone-5-sulfonyl chloride）（NDQ）, which are used for composing LCD positive photoresist sensitive resin（PAC）. It turns out the influence of the different graft matrix on resolution, resistance to alkali and sensitivity of the positive photoresist.The increase of the NDQ results in the augmentation of the PAC＇s inhibition dissolving effect. The mix of PAC and NDQ can strengthen the sensitivity of photoresist in the special condition.
出处
《广东化工》
CAS
2006年第6期58-59,共2页
Guangdong Chemical Industry
