4Shinichi Y. An Ultra Fast-acting Electro-hydraulic Digital Valve and High-speed Electro-hydraulic Servo Valve Using Maltilayered PNT Elements [C]// Proceedings of the Second JHPS International Symposium on Fluid Power, Tokyo, Japan, 1993. Tokyo, Japan: JHPS 1993: 121-130. 被引量:1
5Lindler J E, Anderson E H. Piezoelectric Direct Drive Servovalve [C]// Proceedings of SPIE: Industrial and Commercial Applications of Smart Structures Technologies, San Diego, USA, 2002. USA: SPIE, 2002: 488-496. 被引量:1