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一种新的白光干涉谱数据处理方法 被引量:3

New data processing method of white light interference spectrum
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摘要 为了克服用极值法从白光干涉谱数据求解光程差存在的抗噪声能力差的缺点,提出了一种基于均方差最小意义下新的处理方法.该方法假定当光程差某个估计值与实际值最接近时,对应的干涉谱的均方差最小.首先对干涉谱测量值进行归一化处理,消除低频光强变化的影响,并用极值法求得光程差的初值,然后求归一化的干涉谱与基于初值的理想干涉谱之间的均方差,通过逼近法获得均方差最小时对应的估计值.数值仿真和实验结果表明,利用该方法处理白光干涉谱数据得到的光程差,不仅比极值法具有更高的数据精度,而且有效地提高了抗干扰能力. A new data processing method for white light interference spectrum based on the minimum meansquare deviation was proposed to overcome the poor anti-noise capability of extremum method. It was assumed that when the estimated value of optical path is closest to the actual one, the mean-square deviation between two corresponding interference spectra is minimum. In the new method, the spectrum measured was firstly normalized to eliminate the intensity modulation, and an initial value of optical path was calcu- lated by extremum method. The mean-square deviation between the normalized measured spectrum and the theoretical spectrum from the initial value was calculated. The optimal estimated value was obtained by means of iteration. Emulation and experiments show that the new data processing method has higher precision and better anti-noise capability over the extremum method.
出处 《浙江大学学报(工学版)》 EI CAS CSCD 北大核心 2006年第1期38-40,48,共4页 Journal of Zhejiang University:Engineering Science
关键词 白光干涉 均方差 数据处理 white light interference mean-square deviation data processing
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