摘要
在传统的静电场离子引出中,由于等离子体屏蔽的存在,限制离子引出时间,降低了离子引出率。为了削弱静电场方法中等离子体屏蔽对离子引出的影响,提出了射频共振的方法。射频共振法是利用等离子体回路阻抗与外加射频电场频率之间的相互关系,通过调节射频电场频率,使射频电场与等离子体达到共振状态。当达到共振时,等离子体阻抗最小,电场可以穿透等离子体,提高了离子引出效率。共振法缩短了离子引出时间,提高了离子引出效率,并且可以通过对外加磁场的调节来控制等离子体密度。本文介绍了目前射频共振理论的模拟计算和实验研究情况。
In conventional ion extraction using an electrostatic field, the plasma shield effect limits the ion extraction time and the ion extraction efficiency. A new method using an radio frequency （RF） resonance has been proposed to decrease the influence of the plasma shield effect. This method uses the relation between the RF field and the impedance of the plasma circle. When the RF frequency is swept, the resonance of the RF field and the plasma occurs at a certain frequency, thus the impedance of the plasma becomes the minimum. The electric field penetrates the plasma, and the ion extraction efficiency is raised. The RF method shortens the ion extraction time, and increases the ion extraction efficiency. It can also control the plasma density by changing the magnetic field. This article introduces the simulation calculation and the experimental research of this new method.
出处
《质谱学报》
EI
CAS
CSCD
2005年第2期119-125,共7页
Journal of Chinese Mass Spectrometry Society
关键词
等离子体
射频共振法
离子引出
plasma
radio frequency resonance method
ion extraction
