摘要
激光调阻中激光束平行于电流方向的纵向切割对片式电阻的阻值变化影响较小,掌握其规律并将其应用于调阻过程中能够为提高激光调阻精度提供控制依据。应用电阻细分方法对片式电阻的阻值分析,定性得到在有效纵向切割长度范围内片式电阻的阻值与相对纵向切割长度成线性关系,阐述了该线性关系的应用,并通过分析0603型1 K电阻的实验数据验证了这种关系。讨论了将其实际应用的可能性。
The ordinate cutting,which means that the laser-trimming path is parallel to the current flow, increases the resistance slowly. Mastering the dependence of resistance on the ordinate cutting length and using it in laser-trimming control can improve the trimming precision. Using the resistor-subsection method,the relationship of resistance and ordinate cutting length is studied,and it can be concluded that their relationship is linear within the valid ordinate-cutting length. And the application of the linear relationship is expounded. Through analyzing type 0603 1 k resistors＇experimental data,the linear relationship and its application are validated. It can provide the control basis for precious trimming of resistance.
出处
《光电子．激光》
EI
CAS
CSCD
北大核心
2005年第12期1476-1479,共4页
Journal of Optoelectronics·Laser
基金
国家高技术产业化专项基金资助项目(2002055)
长春市科技攻关计划资助项目(02-130G22)
中科院研究生实践专项创新研究类资助项目([2003]66)
中科院长春光学精密机械与物理研究所青年创新基金资助项目(Q03S07Z)
关键词
激光调阻
纵向切割
阻值
阻值变化率
相对纵向切割长度
laser trimming
ordinate cutting
resistance
resistance varying-ratio
relative ordinate cutting length
