摘要
采用侧向力显微镜研究了磁控溅射方法制备的G eSbT e薄膜在大气环境中的纳米级摩擦性能,考虑了相对湿度、扫描速度及表面粗糙度对其摩擦性能的影响,对比不同成分的G eSbT e薄膜的摩擦特性.结果表明:在相对湿度较大时,扫描速度对针尖和G eSbT e薄膜之间的摩擦力影响很大;在其它条件相同、外加载荷较大时,同一载荷下的摩擦力与表面粗糙度呈线性关系,但在外加载荷较小的情况下,二者呈现非线性变化规律;相对湿度对G e2Sb2T e5薄膜和针尖的粘附力影响较G eSb2T e4薄膜弱,且粘附力使得摩擦系数减小;在同一相对湿度下,由于薄膜成分的变化导致硬度不同,其对薄膜的摩擦性能也有一定影响.
A lateral force microscope （LFM） was used to investigate nanoscale friction behavior of GeSbTe films of 50 nm thickness prepared by magnetron sputtering. Effect of relative humidity, scanning rate, surface roughness on friction and adhesive force was taken into account. Besides, friction behavior of GeSbTe films with different composition was analyzed. Moreover, the morphologies of GeSbTe films were observed on the atomic force microscope （AFM）, and their hardness and elastic modulus values were also measured with a nanoindenter. It was found that scanning rate had some effect on the friction between tip and GeSbTe films under high humidity. The average friction values under the same applied load were nearly linear to surface roughness when the external applied load is higher. However, the two variables presented non-linear relationship when the applied load was lower. Effect of humidity on adhesion between the tip and GeSb2Te4 film was more significant than that between tip and Ge2Sb2Te5 film, and adhesion reduced the friction coefficient; Under the same humidity, difference of film＇s hardness which arise from the variation of film＇s composition had a certain effect on the film＇s friction performance. It is suggested that the anti-compression ability of GeSbTe films should be enhanced besides adding protective coating if the phase mechanism is not affected.
出处
《摩擦学学报》
EI
CAS
CSCD
北大核心
2005年第5期421-425,共5页
Tribology
基金
全国优秀博士学位论文专项基金资助项目(200330)
江苏大学微纳米科学技术研究中心开放基金资助项目(1291400001)
江苏省教育厅基金资助项目(03KJD460066)
