摘要
利用薄膜材料横向尺寸远大于其厚度的特点，通过测量横向传播热波的幅值和相位来确定薄膜的热扩散率是可行的．本文介绍带有背树的薄膜的横向热扩散率的检测理论，以及利用非接触的热辐射技术对金刚石一硅复合膜的检测结果．
It is possible to measure the lateral thermal diffusivity of a thin film because the lateral dimensions of film are far lager than its thickness. The theory about measuring the lateral thermal diffusivity of a film covered on a backing material is discussed. The experimental results obtained by thermal radiometry on the lateral thermal diffusivity of a Diamond-Silicon two-laycr film are presented.
出处
《应用声学》
CSCD
1995年第1期8-12,共5页
Journal of Applied Acoustics
基金
国家自然科学基金
关键词
横向热扩散率
热辐射
金刚石膜
薄膜材料
Lateral thermal diffusivity, Thermal radiometry, Diamond film
