摘要
金刚石膜因其优异的电学、光学等性能已成为优越的辐射探测器材料,但探测器性能强烈地依赖于薄膜质量。本工作利用热丝化学气相沉积(HFCVD)法获得了(100)取向不同质量的金刚石薄膜,并制备了CVD金刚石辐射探测器。应用5.9keV55FeX射线测试了探测器的光电流响应和脉冲高度分布。50kV/cm外电场作用下晶粒为10μm的CVD金刚石探测器的暗电流和光电流分别为16.3和16.8nA。光电流随辐照时间延长而增大,尔后趋于稳定。脉冲高度峰与噪声明显分离。探测器具有较高的计数效率和信噪比。
Diamond is a very attractive material to realize radiation detectors due to its exceptional electrical and optical properties, but the detector performances intensively depend on the film quality. In present work, (100) oriented CVD diamond films with different quality obtained by a hot-filament chemical vapor deposition (HFCVD) technique were used to fabricate radiation detectors. 5.9 keV X-ray from a 55Fe source was used to measure the photocurrents and the pulse height distributions (PHDs) of CVD diamond detectors. For the detector with a better film quality, the dark-current of 16.3 nA and the photocurrent of 16.8 nA were obtained at an electrical field of 50 kV/cm. The time-dependent photocurrents performed in the darkness indicate that the photocurrents initially increase and then level off. The peak of the pulse-height discrimination is well separated from the noise, indicating a higher counting efficiency and a higher signal-noise ratio.
出处
《原子能科学技术》
EI
CAS
CSCD
北大核心
2005年第B07期63-66,72,共5页
Atomic Energy Science and Technology
基金
国家自然科学基金资助项目(60277024)
上海市纳米专项资助项目(0452nm051)
上海应用材料研究与发展基金资助项目(0307)
上海市教育委员会"材料学"重点学科资助课题
