摘要
综述了脉冲沉积(PLD)类金刚石膜(DLC)的优势和局限,对其局限的补偿和突破,以及脉冲沉积法的重要发展方向——超快脉冲激光沉积(Ultra-fast PLD)类金刚石膜(DLC)的研究进展。
The advantage and limit of pulse laser deposition(PLD) of diamond-like carbon films(DLC), the remedy of PLD DLC limit, and the research on the next development of PLD DLC, ultra-fast pulse laser deposition of diamond-like films are summarized.
出处
《激光与光电子学进展》
CSCD
北大核心
2005年第7期22-25,共4页
Laser & Optoelectronics Progress
