摘要
采用绝缘体上Si(SOI)材料制作了马赫曾德干涉型(MZI)SOI热光可变光学衰减器(VOA),利用隔热槽有效降低器件的功率消耗,提高响应速度。在1510～1610nm波长范围内动态调节范围可达到0～29dB。与未加隔热槽的相同结构光学衰减器相比,器件插入损耗和调制深度不受影响。最大衰减(29dB)时功率消耗由360mW降低为130mW,器件响应速度提高1倍,响应时间由大于100μs降为小于50μs。
A silicon-on-insulator (SOI)-based thermo-optic variable optical attenuator (VOA) with the type of a Mach-Zehnder interferometer (MZI) and multimode-interference coupler was fabricated. By introducing U-shaped thermal isolation grooves on both sides of the MZI modulating arms to improve heating efficiency, the power consumption at the maximum modulation depth is reduced and the response frequency is doubled. Modulation depth of 29 dB in the wavelength range 1510 nm to 1610 nm is achieved. Compared with the variable optical attenuator without thermal isolation grooves, the maximum power consumption decreases from 360 mW to 130 mW and the response time decreases from about 100 μs to less than 50 μs, while the insertion loss is not affected.
出处
《光电子．激光》
EI
CAS
CSCD
北大核心
2005年第6期642-645,共4页
Journal of Optoelectronics·Laser
基金
国家"863"计划资助项目(2001AA312250)
